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Applystead salaries · 22 posted pay ranges

Onto Innovation Field Service Engineer salaries

Pay ranges Onto Innovation published in 22 open job postings for Field Service Engineer roles, updated Nov 14, 2026.

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Posted base pay ranges from job listings, not total compensation. Figures are in USD. How these figures are made

Onto Innovation’s Field Service Engineer titles

  1. Field Service Engineer 1 (Entry level)$63.9K median, $63.9K–$63.9K typical, 5 postingsField Service Engineer 1 (Entry level): middle half $63.9K–$63.9K, median $63.9K
  2. Field Service Engineer 2 (Mid level)$75K median, $58.6K–$75K typical, 5 postingsField Service Engineer 2 (Mid level): middle half $58.6K–$75K, median $75K
  3. Field Service Engineer 3 (Senior)$104K median, $89.2K–$104K typical, 11 postingsField Service Engineer 3 (Senior): middle half $89.2K–$104K, median $104K

Pay by level

  1. Entry level$63.9K median, $63.9K–$63.9K typical, 5 postingsEntry level: middle half $63.9K–$63.9K, median $63.9K
  2. Mid level$75K median, $58.6K–$75K typical, 5 postingsMid level: middle half $58.6K–$75K, median $75K
  3. Senior$104K median, $89.2K–$104K typical, 12 postingsSenior: middle half $89.2K–$104K, median $104K

Locations

  1. United States · $89.2K median, 20 postings
  2. Oregon · $104K median, 7 postings
  3. Hillsboro, OR · $104K median, 7 postings
  4. Arizona · $58.6K median, 4 postings
  5. Texas · $104K median, 3 postings
  6. Tucson, AZ · 2 postings
  7. Phoenix, AZ · 2 postings
  8. North Carolina · 1 posting

Newest Onto Innovation Field Service Engineer postings

  1. Field Service Engineer 3Onto Innovation · Hillsboro, OR · $83.4K–$125K/yr · Posted Nov 13, 2026
  2. Field Service Engineer 3Onto Innovation · Remote · $83.4K–$125K/yr · Posted Nov 13, 2026
  3. Field Service Engineer 3Onto Innovation · Remote · $71.4K–$107K/yr · Posted Nov 13, 2026
  4. Field Service Engineer 3Onto Innovation · Dallas, TX · $83.4K–$125K/yr · Posted Nov 13, 2026
  5. Field Service Engineer 3Onto Innovation · Hillsboro, OR · $83.4K–$125K/yr · Posted Nov 13, 2026
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