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Applystead salaries · 36 posted pay ranges

Onto Innovation Systems Engineer salaries

Pay ranges Onto Innovation published in 36 open job postings for Systems Engineer roles, updated Nov 14, 2026.

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Posted base pay ranges from job listings, not total compensation. Figures are in USD. How these figures are made

Onto Innovation’s Systems Engineer titles

  1. Systems Engineer 1 (Entry level)$75.1K median, $75.1K–$75.1K typical, 4 postingsSystems Engineer 1 (Entry level): middle half $75.1K–$75.1K, median $75.1K
  2. Systems Engineer 3 (Senior)$121K median, $108K–$121K typical, 4 postingsSystems Engineer 3 (Senior): middle half $108K–$121K, median $121K
  3. Senior Systems Engineer (Senior)$144K median, $144K–$160K typical, 18 postingsSenior Systems Engineer (Senior): middle half $144K–$160K, median $144K
  4. Staff Systems Engineer (Staff)$162K median, $162K–$162K typical, 3 postingsStaff Systems Engineer (Staff): middle half $162K–$162K, median $162K
  5. Principal Systems Engineer (Principal)$180K median, $163K–$200K typical, 7 postingsPrincipal Systems Engineer (Principal): middle half $163K–$200K, median $180K

Pay by level

  1. Entry level$75.1K median, $75.1K–$75.1K typical, 4 postingsEntry level: middle half $75.1K–$75.1K, median $75.1K
  2. Senior$144K median, $144K–$160K typical, 22 postingsSenior: middle half $144K–$160K, median $144K
  3. Staff$162K median, $162K–$162K typical, 3 postingsStaff: middle half $162K–$162K, median $162K
  4. Principal$180K median, $163K–$200K typical, 7 postingsPrincipal: middle half $163K–$200K, median $180K

Locations

  1. United States · $160K median, 36 postings
  2. California · $160K median, 9 postings
  3. Massachusetts · $144K median, 9 postings
  4. Milpitas, CA · $160K median, 9 postings
  5. Wilmington, MA · $144K median, 9 postings
  6. North Carolina · $144K median, 7 postings
  7. Wilmington, NC · $144K median, 7 postings
  8. Oregon · $144K median, 4 postings

Newest Onto Innovation Systems Engineer postings

  1. Senior Systems EngineerOnto Innovation · Milpitas, CA · $128K–$192K/yr · Posted Nov 11, 2026
  2. Senior Systems EngineerOnto Innovation · Milpitas, CA · $128K–$192K/yr · Posted Nov 11, 2026
  3. Systems Engineer 3Onto Innovation · Wilmington, MA · $97K–$145K/yr · Posted Nov 9, 2026
  4. Senior Systems EngineerOnto Innovation · Wilmington, MA · $115K–$173K/yr · Posted Nov 7, 2026
  5. Senior Systems EngineerOnto Innovation · Milpitas, CA · $128K–$192K/yr · Posted Nov 7, 2026
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