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Onto Innovation Software Engineer salaries

Pay ranges Onto Innovation published in 24 open job postings for Software Engineer roles, updated Nov 14, 2026.

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Posted base pay ranges from job listings, not total compensation. Figures are in USD. How these figures are made

Onto Innovation’s Software Engineer titles

  1. Software Engineer 3 (Senior)$121K median, $121K–$144K typical, 5 postingsSoftware Engineer 3 (Senior): middle half $121K–$144K, median $121K
  2. Senior Software Engineer (Senior)$144K median, $128K–$144K typical, 11 postingsSenior Software Engineer (Senior): middle half $128K–$144K, median $144K
  3. Staff Software Engineer (Staff)$162K median, $162K–$180K typical, 5 postingsStaff Software Engineer (Staff): middle half $162K–$180K, median $162K
  4. Principal Software Engineer (Principal)$180K median, $180K–$180K typical, 3 postingsPrincipal Software Engineer (Principal): middle half $180K–$180K, median $180K

Pay by level

  1. Senior$144K median, $121K–$144K typical, 16 postingsSenior: middle half $121K–$144K, median $144K
  2. Staff$162K median, $162K–$180K typical, 5 postingsStaff: middle half $162K–$180K, median $162K
  3. Principal$180K median, $180K–$180K typical, 3 postingsPrincipal: middle half $180K–$180K, median $180K

Locations

  1. United States · $144K median, 23 postings
  2. Oregon · $144K median, 6 postings
  3. Hillsboro, OR · $144K median, 6 postings
  4. North Carolina · $144K median, 4 postings
  5. Massachusetts · $144K median, 4 postings
  6. Wilmington, NC · $144K median, 4 postings
  7. Wilmington, MA · $144K median, 4 postings
  8. New Jersey · 2 postings

Newest Onto Innovation Software Engineer postings

  1. Senior Software EngineerOnto Innovation · Hillsboro, OR · $115K–$173K/yr · Posted Nov 7, 2026
  2. Senior Software EngineerOnto Innovation · Wilmington, MA · $115K–$173K/yr · Posted Nov 5, 2026
  3. Senior Software EngineerOnto Innovation · Hillsboro, OR · $115K–$173K/yr · Posted Nov 5, 2026
  4. Senior Software EngineerOnto Innovation · Hillsboro, OR · $115K–$173K/yr · Posted Nov 3, 2026
  5. Senior Software EngineerOnto Innovation · Wilmington, MA · $115K–$173K/yr · Posted Oct 31, 2026
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